JPH0269721U - - Google Patents
Info
- Publication number
- JPH0269721U JPH0269721U JP14941388U JP14941388U JPH0269721U JP H0269721 U JPH0269721 U JP H0269721U JP 14941388 U JP14941388 U JP 14941388U JP 14941388 U JP14941388 U JP 14941388U JP H0269721 U JPH0269721 U JP H0269721U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- chip
- vortex generator
- strain gauge
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 239000012530 fluid Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14941388U JPH0269721U (en]) | 1988-11-16 | 1988-11-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14941388U JPH0269721U (en]) | 1988-11-16 | 1988-11-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0269721U true JPH0269721U (en]) | 1990-05-28 |
Family
ID=31421621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14941388U Pending JPH0269721U (en]) | 1988-11-16 | 1988-11-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0269721U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8869604B2 (en) | 2010-09-08 | 2014-10-28 | Toyota Jidosha Kabushiki Kaisha | Flow rate detection device |
-
1988
- 1988-11-16 JP JP14941388U patent/JPH0269721U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8869604B2 (en) | 2010-09-08 | 2014-10-28 | Toyota Jidosha Kabushiki Kaisha | Flow rate detection device |
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